Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erik Sauar0
Per Arne Wang0
Date of Patent
June 28, 2011
0Patent Application Number
119881320
Date Filed
June 26, 2006
0Patent Primary Examiner
Patent abstract
A method for reducing attraction forces between wafers (4) is provided. This method includes the step of, after sawing and before dissolution of the adhesive (5), introducing spacers (6) between wafers (4). A wafer singulation method and an agent for use in the method are also provided.
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