Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takahiro Kume0
Tomohiro Iwao0
Date of Patent
July 12, 2011
Patent Application Number
12464054
Date Filed
May 11, 2009
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A polishing sheet which can improve waviness at a face of a material to be polished and which has a long life is provided. The polishing pad 1 has a polyurethane sheet 2 made of polyurethane resin. The polyurethane sheet 2 has a polishing layer which is disposed inside a surface layer and which is allowed to wear away by polishing and whose thickness is larger than a thickness of the surface layer. The polishing layer has an approximately uniform foam structure in a direction of the thickness of the polishing sheet 2 by being formed foams whose space volume is larger than that of foams formed at the surface layer and which are communicated so as to form a network by continuous holes.
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