Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ki Jun Yun0
Date of Patent
July 12, 2011
0Patent Application Number
126436550
Date Filed
December 21, 2009
0Patent Primary Examiner
Patent abstract
A flash memory device and a method for fabricating the same are disclosed. The flash memory device includes an ONO layer on a substrate, polysilicon gates on the ONO layer, a gate oxide layer on the substrate, the ONO layer and the polysilicon gates, and a low temperature oxide layer and polysilicon sidewall spacers on outer side surfaces of the polysilicon gates, except in a region between nearest adjacent polysilicon gates.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
