US Patent 7977609 Temperature measuring device using oscillating frequency signals
Patent 7977609 was granted and assigned to Tokyo Electron on July, 2011 by the United States Patent and Trademark Office.
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This invention provides a wafer-type temperature sensor capable of eliminating the need for an A/D converter, adapting itself to automation and improving the heat resistance to measure temperature distribution of the upper surface of a wafer, a temperature measuring device using the sensor, a thermal processor having a temperature measurement function and a temperature measurement method. The wafer-type temperature sensor comprises a wafer and a plurality of temperature sensors arranged in regions which are formed by segmenting the upper surface of the wafer into a plurality of regions. Each of the temperature sensors includes an oscillation circuit for oscillating a frequency signal corresponding to the temperature of its own region within a frequency band that is different for every region in response to input of power supply voltage.
US Patent 07977609 Temperature measuring device using oscillating frequency signals US Patent 7977609 Temperature measuring device using oscillating frequency signals
US Patent 07977609 Temperature measuring device using oscillating frequency signals
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