Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hsiang-Yi Wang0
Chen-Nan Yeh0
Cheng-Hung Chang0
Cheng-Tung Lin0
Chen-Hua Yu0
Date of Patent
July 12, 2011
Patent Application Number
12777937
Date Filed
May 11, 2010
Patent Primary Examiner
Patent abstract
A semiconductor device and system for a hybrid metal fully silicided (FUSI) gate structure is disclosed. The semiconductor system comprises a PMOS gate structure, the PMOS gate structure including a first high-κ dielectric layer, a P-metal layer, a mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-κ dielectric layer, the P-metal layer and a fully silicided layer formed on the P-metal layer. The semiconductor system further comprises an NMOS gate structure, the NMOS gate structure includes a second high-κ dielectric layer, the fully silicided layer, and the mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-κ dielectric and the fully silicided layer.
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