Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Todd J. Davis0
Steven George Hansen0
Theodore A. Paxton0
Todd D. Hiar0
Cassandra May Owen0
James J. Hunter0
Date of Patent
July 19, 2011
Patent Application Number
11177490
Date Filed
July 11, 2005
Patent Primary Examiner
Patent abstract
A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.
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