US Patent 7981985 Polymer and chemically amplified resist composition comprising the same

Patent 7981985 was granted and assigned to Sumitomo Chemical on July, 2011 by the United States Patent and Trademark Office.

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Patent Number

Patent Inventor Names

Mitsuhiro Hata0

Yusuke Fuji0

Date of Patent

July 19, 2011

Patent Application Number

12426038

Date Filed

April 17, 2009

Patent Primary Examiner

Patent abstract

The present invention provides a polymer containing a structural unit represented by the formula (Ia) or (Ib):

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