Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Patricia M. Savu0
William M. Lamanna0
Michael J. Parent0
Date of Patent
July 26, 2011
0Patent Application Number
128712750
Date Filed
August 30, 2010
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.
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