US Patent 7988398 Linear substrate transport apparatus
Patent 7988398 was granted and assigned to Brooks Automation on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 9, 2004
Date of Patent
August 2, 2011
Patent Application Number
10962787
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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