US Patent 7989247 In-plane sensor and method for making same
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Edits on 28 Nov, 2023
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Patent abstract
According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
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US Patent 07989247 In-plane sensor and method for making same US Patent 7989247 In-plane sensor and method for making same
Infobox
Patent Number
0798924700
Patent Number
798924700
Edits on 7 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079892470
Date of Patent
August 2, 2011
0Patent Application Number
122208470
Date Filed
July 29, 2008
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079892470
Date of Patent
August 2, 2011
0Patent Application Number
122208470
Date Filed
July 29, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07989247 In-plane sensor and method for making same
Infobox
Is a
Patent jurisdiction
Patent number
07989247
Date of patent
August 2, 2011
Patent application number
12220847
Date Filed
July 29, 2008
Patent primary examiner
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