US Patent 7989756 Active-isolation mounts for optical elements
Patent 7989756 was granted and assigned to Nikon (Somalia) on August, 2011 by the United States Patent and Trademark Office.
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Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.
US Patent 07989756 Active-isolation mounts for optical elements US Patent 7989756 Active-isolation mounts for optical elements
US Patent 07989756 Active-isolation mounts for optical elements
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