US Patent 7990543 Surface characterization based on optical phase shifting interferometry
Patent 7990543 was granted and assigned to California Institute of Technology on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 2, 2008
0
Date of Patent
August 2, 2011
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Patent Application Number
12203050
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Patent Citations Received
Patent Inventor Names
Michael Mello
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Ares J. Rosakis
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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