US Patent 7993093 Systems and methods for wafer translation
Patent 7993093 was granted and assigned to Applied Materials on August, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A two-axis automation system can be used to transfer and rotate wafers between horizontal and vertical orientations necessary for differing steps in a semiconductor fabrication process. The two rotational axes allow for the transfer and rotation to be done in a minimal space and with a minimum amount of swept volume. A transfer arm of the automation system can include a pair of load pads capable of loading and unloading a wafer processing chamber in a single sweep.
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US Patent 07993093 Systems and methods for wafer translation US Patent 7993093 Systems and methods for wafer translation
Infobox
Patent Number
0799309300
Patent Number
799309300
Edits on 22 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079930930
Date of Patent
August 9, 2011
0Patent Application Number
109416000
Date Filed
September 15, 2004
0Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079930930
Date of Patent
August 9, 2011
0Patent Application Number
109416000
Date Filed
September 15, 2004
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07993093 Systems and methods for wafer translation
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07993093
Date of patent
August 9, 2011
Patent application number
10941600
Date Filed
September 15, 2004
Patent primary examiner
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