US Patent 7993457 Deposition sub-chamber with variable flow
Patent 7993457 was granted and assigned to Novellus Systems on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 23, 2007
Date of Patent
August 9, 2011
Patent Application Number
11626328
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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