Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 9, 2011
Patent Application Number
12412553
Date Filed
March 27, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
An inductive plasma applicator comprises a ferromagnetic inductively coupled source and an electrode with a hole pattern centered with respect to the plasma source. Such plasma applicator provides an efficient energy transfer to the plasma. The plasma applicator is preferably manufactured using a technology for producing electrical circuits. The electrode and a coil of the ferromagnetic inductively coupled plasma source are metal track portions formed on an insulating substrate. For example, the plasma applicator is manufactured using printed circuit board technology.
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