Patent attributes
A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer. The piezoelectric layer is formed of columnar crystals, and one part of the piezoelectric layer disposed on the insulator film has a smaller average grain size than the other part of the piezoelectric layer disposed on the orientation control layer.
