Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
David J. Seagle0
Robert S. Beach0
Arley C. Marley0
Date of Patent
August 16, 2011
0Patent Application Number
120064060
Date Filed
December 31, 2007
0Patent Primary Examiner
Patent abstract
A wafer comprises a kerf region and a test chip. The kerf is a region in a wafer designated to be destroyed by chip dicing. The test chip is located within the kerf region and is configured to provide parametric data for a wafer fabrication process of a head. The test chip comprises a shield portion of a first shield layer electrically coupled to an element, a first pad within a second shield layer electrically coupled to the element, and a second pad within the second shield layer electrically coupled to the shield portion.
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