US Patent 7999916 Microlithographic projection exposure apparatus
Patent 7999916 was granted and assigned to Carl Zeiss SMT on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 24, 2008
Date of Patent
August 16, 2011
Patent Application Number
12053993
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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