US Patent 8001808 Disassemblable burner for a vapor deposition process

A burner for a vapor deposition process has a cylindrical central gas passage and a plurality of external gas passages surrounding the central gas passage. The burner has a back block defining an initial section of the gas passages, a face block defining a final section of the gas passages and a manifold plate positioned between the back block and the face block and defining an intermediate section of the external gas passages; the face block, the manifold plate and the back block have inner integral walls that define respective sections of the central gas passage.