US Patent 8003296 Chemically amplified positive resist composition
Patent 8003296 was granted and assigned to Sumitomo Chemical on August, 2011 by the United States Patent and Trademark Office.
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Edits on 28 Nov, 2023
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Patent abstract
The present invention provides a chemically amplified positive composition comprising:(A) a resin comprising a structural unit having an acid-labile group and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid,(B) a resin comprising a structural unit represented by the formula (I):
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Infobox (+1/-1 properties)
US Patent 08003296 Chemically amplified positive resist composition US Patent 8003296 Chemically amplified positive resist composition
Infobox
Patent Number
0800329600
Patent Number
800329600
Edits on 2 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
080032960
Date of Patent
August 23, 2011
0Patent Application Number
125363860
Date Filed
August 5, 2009
0Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
080032960
Date of Patent
August 23, 2011
0Patent Application Number
125363860
Date Filed
August 5, 2009
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 08003296 Chemically amplified positive resist composition
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08003296
Date of patent
August 23, 2011
Patent application number
12536386
Date Filed
August 5, 2009
Patent primary examiner
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