Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 23, 2011
Patent Application Number
12217732
Date Filed
July 8, 2008
Patent Primary Examiner
Patent abstract
According to the present invention, a micro-electro-mechanical system (MEMS) device comprises: a thin film structure including at least a metal layer and a protection layer deposited in any order; and a protrusion connected under the thin film structure. A preferred thin film structure includes at least a lower protection layer, a metal layer and an upper protection layer. The MEMS device for example is a capacitive MEMS acoustical sensor.
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