Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Young Bang Lee0
Kwang Kee Chae0
Ok Min Moon0
Date of Patent
August 30, 2011
0Patent Application Number
128341210
Date Filed
July 12, 2010
0Patent Primary Examiner
Patent abstract
A method for manufacturing a semiconductor device includes the step of conducting a cleaning process for a wafer formed with copper wiring lines to remove contaminations produced on a back surface of the wafer. The cleaning process is conducted by injecting onto the back surface of the wafer an etchant for removing contaminations and simultaneously injecting onto a front surface of the wafer a reductant containing hydrogen.
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