US Patent 8008202 Ruthenium CMP compositions and methods
Patent 8008202 was granted and assigned to Cabot Microelectronics (company) on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 1, 2007
Date of Patent
August 30, 2011
Patent Application Number
11888406
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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