US Patent 8008602 Electrostatic chuck heater
Patent 8008602 was granted and assigned to NGK Insulators on August, 2011 by the United States Patent and Trademark Office.
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Patent abstract
An electrostatic chuck heater is provided including a base which is formed by applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode, calcining the alumina sintered body, arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode, and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set to not more than 0.25%.
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Patent Inventor Names
Akiyoshi Hattori0
Takeru Torigoe0
Yutaka Mori0
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US Patent 08008602 Electrostatic chuck heater US Patent 8008602 Electrostatic chuck heater
Infobox
Patent Number
080086020
Patent Number
80086020
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
080086020
Date of Patent
August 30, 2011
0Patent Application Number
118797400
Date Filed
July 18, 2007
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 08008602 Electrostatic chuck heater
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08008602
Date of patent
August 30, 2011
Patent application number
11879740
Date Filed
July 18, 2007
Patent primary examiner
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