Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mayumi Yamaguchi0
Konami Izumi0
Date of Patent
August 30, 2011
0Patent Application Number
124827610
Date Filed
June 11, 2009
0Patent Primary Examiner
Patent abstract
A micromachine includes a microstructure and a semiconductor element formed over one insulating substrate. The micromachine includes including a movable layer containing polycrystalline silicon and a space below or above the layer. Such polycrystalline silicon is formed on an insulating surface, so that it is used as a microstructure and used for forming a semiconductor element. Accordingly, a semiconductor device may include a microstructure and a semiconductor element provided over one insulating substrate.
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