US Patent 8011388 Thermally actuated microvalve with multiple fluid ports
Patent 8011388 was granted and assigned to Microstaq on September, 2011 by the United States Patent and Trademark Office.
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A MEMS device is disclosed having a single microvalve actuator for controlling multiple microvalves. Exemplary embodiments include a MEMS device including two microvalves formed on a beam positioned by an actuator, the two microvalves controlling separate flow paths between two separate pairs of ports; a device with a two-way pilot operated microvalve and a four-way pilot microvalve for controlling the two-way pilot operated microvalve; a device with two three-way microvalves actuated by a common microvalve actuator; and a two-way microvalve with a moveable microvalve element and a feedback port formed in the moveable element operable to regulate the pressure on an end of the moveable element relative to the movement of the moveable element between the first position and the second position. Also disclosed is a MEMS device including a beam with a plurality of apertures formed therein, resulting in a mass reduction of at least 10 percent.
US Patent 08011388 Thermally actuated microvalve with multiple fluid ports US Patent 8011388 Thermally actuated microvalve with multiple fluid ports
US Patent 08011388 Thermally actuated microvalve with multiple fluid ports
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