US Patent 8012586 Diamond like carbon coating of substrate housings
Patent 8012586 was granted and assigned to Entegris on September, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 14, 2007
Date of Patent
September 6, 2011
Patent Application Number
12515606
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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