Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeshi Ishiguro0
Hugh J. Griffin0
Kenji Sugiura0
Date of Patent
September 6, 2011
0Patent Application Number
120318950
Date Filed
February 15, 2008
0Patent Primary Examiner
Patent abstract
A method of manufacturing a superjunction device includes providing a semiconductor wafer having at least one die. At least one first trench having a first orientation is formed in the at least one die. At least one second trench having a second orientation that is different from the first orientation is formed in the at least one die.
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