US Patent 8029226 Semiconductor manufacturing systems
Patent 8029226 was granted and assigned to Brooks Automation on October, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 26, 2008
Date of Patent
October 4, 2011
Patent Application Number
12239717
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 8029226 Semiconductor manufacturing systems
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
