Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Moritz Nitschke0
Date of Patent
October 25, 2011
Patent Application Number
12471769
Date Filed
May 26, 2009
Patent Citations Received
0
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Patent Primary Examiner
Patent abstract
A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps:a. carrying out an arc detection for at least one of the power supplies;b. generating at least one signal relating to the arc detection and/or data relating to the arc detection;
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