Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Patrick Simpkins0
Cory Watkins0
Date of Patent
October 25, 2011
Patent Application Number
10890734
Date Filed
July 14, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
An inspection tool includes a camera for obtaining images of a wafer and a controller configured for performing light source flat field correction, optical image warping correction, and optical image scale correction of the images. In operation, separate inspection tools are calibrated separately to obtain a characteristic response with respect to imaging and/or illumination for each such inspection tool. A standard target is then imaged by each inspection tool and the response of each of the inspection tools is normalized to ensure uniformity of the output of each inspection tool with respect to the other inspection tools.
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