US Patent 8047075 Vertically integrated 3-axis MEMS accelerometer with electronics
Patent 8047075 was granted and assigned to Invensense (company) on November, 2011 by the United States Patent and Trademark Office.
Is a
Date Filed
June 21, 2007
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Date of Patent
November 1, 2011
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Patent Application Number
11766776
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Patent Inventor Names
Goksen Yaralioglu
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Joseph Seeger
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Steven S. Nasiri
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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