US Patent 8049515 Silicon MEMS resonators
Patent 8049515 was granted and assigned to Infineon Technologies on November, 2011 by the United States Patent and Trademark Office.
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Patent abstract
The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.
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US Patent 08049515 Silicon MEMS resonators US Patent 8049515 Silicon MEMS resonators
Infobox
Patent Number
0804951500
Patent Number
804951500
Edits on 30 Mar, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
080495150
Date of Patent
November 1, 2011
0Patent Application Number
127914950
Date Filed
June 1, 2010
0Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
080495150
Date of Patent
November 1, 2011
0Patent Application Number
127914950
Date Filed
June 1, 2010
0Patent Primary Examiner
Edits on 14 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 08049515 Silicon MEMS resonators
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08049515
Date of patent
November 1, 2011
Patent application number
12791495
Date Filed
June 1, 2010
Patent primary examiner
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