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Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 29, 2011
Patent Application Number
12676318
Date Filed
August 28, 2008
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A polishing pad includes polishing elements interdigitated with one another over a surface of the polishing pad. Each of the polishing elements is secured so as to restrict lateral movement thereof with respect to others of the polishing elements, but remains moveable in an axis normal to a polishing surface of the polishing elements. Different densities of the polishing elements may be positioned within different areas of the surface of the polishing pad.
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