Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 6, 2011
Patent Application Number
12025769
Date Filed
February 5, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.
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