Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas Wagner0
Hans Artmann0
Peter Schmollngruber0
Date of Patent
December 13, 2011
0Patent Application Number
124513150
Date Filed
May 26, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A micromechanical component includes a substrate that has a front side and a backside, the front side having a functional pattern, which functional pattern is electrically contacted to the backside in a contact region. The substrate has at least one contact hole in the contact region, which extends into the substrate, starting from the backside.
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