Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tatsuya Iwasaki0
Toru Den0
Naho Itagaki0
Date of Patent
December 27, 2011
0Patent Application Number
124471990
Date Filed
November 9, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for manufacturing a thin film transistor containing an channel layer 11 having indium oxide, including forming an indium oxide film as an channel layer and subjecting the formed indium oxide film to an annealing in an oxidizing atmosphere.
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