US Patent 8088298 Spectra based endpointing for chemical mechanical polishing
Patent 8088298 was granted and assigned to Applied Materials on January, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 29, 2008
Date of Patent
January 3, 2012
Patent Application Number
12182076
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 8088298 Spectra based endpointing for chemical mechanical polishing
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
