US Patent 8092605 Magnetic confinement of a plasma
Patent 8092605 was granted and assigned to Applied Materials on January, 2012 by the United States Patent and Trademark Office.
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A method and apparatus for confining a plasma are provided herein. In one embodiment, an apparatus for confining a plasma includes a substrate support and a magnetic field forming device for forming a magnetic field proximate a boundary between a first region disposed at least above the substrate support, where a plasma is to be formed, and a second region, where the plasma is to be selectively restricted. The magnetic field has b-field components perpendicular to a direction of desired plasma confinement that selectively restrict movement of charged species of the plasma from the first region to the second region dependent upon the process conditions used to form the plasma.
US Patent 08092605 Magnetic confinement of a plasma US Patent 8092605 Magnetic confinement of a plasma
US Patent 08092605 Magnetic confinement of a plasma
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