Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Koji Fukumoto0
Date of Patent
January 17, 2012
Patent Application Number
12303902
Date Filed
June 6, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
An inertial sensor includes a drive structure 11 which performs one reference oscillation in an XY plane, and force detecting structures 12 (12-1 to 12-4) which each have a plurality of detection axes and which are arranged on an X axis and a Y axis in the drive structure 11 in pairs at positions symmetrical about an origin, wherein angular velocities in three axes and accelerations in three axes are detected by providing the force detecting structure 12 with the plurality of detection axes including at least one detection axis orthogonal to the one reference oscillation.
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