US Patent 8101531 Plasma-activated deposition of conformal films
Patent 8101531 was granted and assigned to Novellus Systems on January, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 23, 2010
Date of Patent
January 24, 2012
Patent Application Number
12889132
Patent Citations Received
Patent Inventor Names
Adrien LaVoie
0
Ming Li
0
Hu Kang
0
Mandyam Sriram
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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