Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 3, 2012
Patent Application Number
11548097
Date Filed
October 10, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.
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