US Patent 8163144 Magnetron sputtering device
Is a
Date Filed
August 17, 2005
0
Date of Patent
April 24, 2012
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Patent Application Number
11205398
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Patent Inventor Names
Richard I. Seddon
0
Jeremy Hayes
0
Markus K. Tilsch
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Robert E. Klinger
0
Georg J. Ockenfuss
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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