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US Patent 8168057 Balancing pressure to improve a fluid seal

Patent 8168057 was granted and assigned to Nexx Systems on May, 2012 by the United States Patent and Trademark Office.

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Patent

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Current Assignee
‌
Nexx Systems
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8168057
Date of Patent
May 1, 2012
Patent Application Number
12790264
Date Filed
May 28, 2010
Patent Primary Examiner
‌
Bruce Bell
Patent abstract

A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.

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