US Patent 8171801 Micro-thermistor gas pressure sensor
Patent 8171801 was granted and assigned to Institut National d'Optique on May, 2012 by the United States Patent and Trademark Office.
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An apparatus and method precisely measure gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressure sensor assembly includes a suspended platform micro-thermistor sensor device exposed to the gas pressure of a given atmospheric environment, an electrical readout circuit connected to the suspended platform micro-thermistor sensor device, wherein the suspended platform micro-thermistor sensor device acts as a variable electrical resistance in the readout electrical circuit, a binary-wave voltage source connected to the suspended platform micro-thermistor sensor device, and an ohmmeter.
US Patent 08171801 Micro-thermistor gas pressure sensor US Patent 8171801 Micro-thermistor gas pressure sensor
US Patent 08171801 Micro-thermistor gas pressure sensor
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