Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yosuke Muraguchi0
Yushi Sato0
Katsumi Yasuda0
Kazunari Kitaji0
Minoru Maeda0
Toshio Miki0
Yasushi Muragishi0
Date of Patent
May 15, 2012
Patent Application Number
12536735
Date Filed
August 6, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.
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