Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 15, 2012
Patent Application Number
12003330
Date Filed
December 21, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
A helicon plasma source has a discharge tube, a radio frequency antenna disposed proximate the discharge tube, and a permanent magnet positioned with respect to the discharge tube so that the discharge tube is in a far-field region of a magnetic field produced by the permanent magnet.
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