Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 29, 2012
Patent Application Number
12341972
Date Filed
December 22, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Various embodiments of the present invention are generally directed to a method and apparatus for transferring an XY image to a rotating substrate, such as a semiconductor substrate, storage medium, etc. An XY image pattern comprising a plurality of image elements is divided into a matrix of adjacent tiles. A write beam is used to write the XY image pattern to a rotating substrate by defining a radial path at a selected radius of the rotating substrate, identifying the tiles of said matrix that intersect said radial path, and writing a portion of the XY image pattern at the selected radius using image elements from the identified tiles.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.