US Patent 8193027 Method of making a multicomponent film
Patent 8193027 was granted and assigned to AIR PRODUCTS AND CHEMICALS, INC. on June, 2012 by the United States Patent and Trademark Office.
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Described herein is a method and liquid-based precursor composition for depositing a multicomponent film. In one embodiment, the method and compositions described herein are used to deposit Germanium Tellurium (GeTe), Antimony Tellurium (SbTe), Antimony Germanium (SbGe), Germanium Antimony Tellurium (GST), Indium Antimony Tellurium (IST), Silver Indium Antimony Tellurium (AIST), Cadmium Telluride (CdTe), Cadmium Selenide (CdSe), Zinc Telluride (ZnTe), Zinc Selenide (ZnSe), Copper indium gallium selenide (CIGS) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.
US Patent 08193027 Method of making a multicomponent film US Patent 8193027 Method of making a multicomponent film
US Patent 08193027 Method of making a multicomponent film
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