US Patent 8198630 Semiconductor device and manufacturing method thereof
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Patent abstract
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high. By performing the formation of the pixel electrode, the source region and the drain region by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized, FIG. 2.
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Patent Inventor Names
Hideaki Kuwabara0
Shunpei Yamazaki0
Yasuyuki Arai0
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US Patent 08198630 Semiconductor device and manufacturing method thereof US Patent 8198630 Semiconductor device and manufacturing method thereof
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Patent Number
08198630
Patent Number
8198630
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US Patent 08198630 Semiconductor device and manufacturing method thereof
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Is a
Patent jurisdiction
Patent number
08198630
Date of patent
June 12, 2012
Patent application number
12789382
Date Filed
May 27, 2010
Patent primary examiner
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